Tagged: resonators

According to recent research from Japan, “A four-points-inner-pinned ring-shaped microelectromechanical systems (MEMS) resonator has been investigated. The simulated comparison between disk-and ring-shaped resonators indicates that the ...

Journal of Microelectromechanical Systems , Vol. 12, No. 4. , pp. 487-496. Posts Export Abstract This paper reports on the fabrication and characterization of high-quality factor single crystal silicon in-plane capacitive beam resonators with sub-100 nm to submicron transduction gaps using the HARPSS process.

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