Tagged: resonators

Journal of Microelectromechanical Systems , Vol. 12, No. 4. , pp. 487-496. Posts Export Abstract This paper reports on the fabrication and characterization of high-quality factor single crystal silicon in-plane capacitive beam resonators with sub-100 nm to submicron transduction gaps using the HARPSS process.

To insert individual citation into a bibliography in a word-processor, select your preferred citation style below and drag-and-drop it into the document.

I have previously written about some of the exciting work he was doing using MEMS (microelectromechanical systems) suspended microchannel resonators to weigh things with femtogram precision so you can imagine my excitement to see the ...

The resonators are fabricated on SOI substrates using a HARPSS-based fabrication process and are 3 to 18 I1 4m thick.